Wafer pod transfer assembly
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Wei Chou, Sheng-Yuan Lin, Yuan-Hsin Chi, Yin-Tun Chou, Hung-Chih Wang, Yu-Chi Liu
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Abstract
A wafer pod transfer assembly includes a wafer pod port to receive a wafer pod, a transfer axle coupled to the wafer pod port, a shaft receiver, a shaft coupled to the transfer axle and to the shaft receiver, a pin through the shaft receiver and through the shaft, wherein the pin comprises a first end and a second end, opposite the first end, and a pin buckle including a first loop and a second loop. The pin buckle is coupled to the pin, the first loop encircles the first end of the pin, and the second loop encircles the second end of the pin.
Claims20
A wafer pod transfer assembly, comprising:
- a wafer pod port to receive a wafer pod;
- a transfer axle coupled to the wafer pod port;
- a shaft receiver;
- a shaft coupled to the transfer axle and to the shaft receiver;
- a belt coupled to the transfer axle and to the shaft;
- a pin through the shaft receiver and through the shaft, wherein the pin comprises a first end and a second end, opposite the first end;
- and
- a pin buckle comprising a first loop and a second loop, wherein:
- the pin buckle is coupled to the pin,
- the first loop encircles the first end of the pin, and
- the second loop encircles the second end of the pin.
A wafer pod transfer assembly, comprising:
- a wafer pod port to receive a wafer pod;
- a shaft coupled to the wafer pod port;
- a shaft receiver coupled to the shaft;
- a pin screw through the shaft receiver and through the shaft;
- a pin through the shaft receiver and through the shaft;
- and
- a pin buckle coupled to the pin, wherein the pin buckle comprises:
- a first loop encircling a first end of the pin;
- a second loop encircling a second end of the pin, different than the first end of the pin;
- and
- a C-shaped portion between the first loop and the second loop, wherein the C-shaped portion partially encircles the shaft receiver.
A wafer pod transfer assembly, comprising:
- a shaft receiver comprising:
- first interior surfaces defining a shaft receiving region of the shaft receiver;
- and
- second interior surfaces defining a pin receiving region of the shaft receiver;
- a shaft disposed within the shaft receiving region;
- a pin comprising:
- a first pin region traversing the pin receiving region;
- a first end;
- and
- a second end;
- a pin buckle comprising:
- a first loop encircling the first end of the pin;
- a second loop encircling the second end of the pin;
- and
- a C-shaped portion between the first loop and the second loop;
- a pin screw through the shaft receiver and through the shaft, wherein the pin screw abuts a side surface of the pin;
- a drive assembly coupled to the shaft;
- and
- a tilt assembly coupled to the drive assembly.
Dependencies are inferred from the claim text.