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US 11,600,497 B2Granted
Using absolute Z-height values for synergy between tools
AssigneeKLA Corporation
InventorsSandeep Madhogarhia, Hari Sriraman Pathangi, Rohit Bhat
Life of this patent
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Abstract
A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
Claims14
A system comprising:
- a particle beam generator in a semiconductor review tool that generates a particle beam;
- a platen in the semiconductor review tool configured to hold a semiconductor wafer;
- a detector in the semiconductor review tool configured to receive the particle beam reflected off the semiconductor wafer;
- and
- a processor in electronic communication with detector, wherein the processor is configured to:
- receive absolute Z-height values with respect to a tool component of the semiconductor review tool, azimuthal angle values, and polar angle values for the semiconductor wafer;
- send instructions to review the semiconductor wafer with the particle beam within a Z-height based on the absolute Z-height values at locations of the azimuthal angle values and the polar angle values;
- and
- adjust focus of the semiconductor review tool to within the Z-height during the review of the semiconductor wafer.
6 more elements
A method comprising:
- receiving, at a semiconductor review tool, absolute Z-height values with respect to a tool component of a semiconductor review tool, azimuthal angle values, and polar angle values for a semiconductor wafer;
- reviewing the semiconductor wafer using the semiconductor review tool at locations of the azimuthal angle values and the polar angle values, wherein the review begins at the absolute Z-height values includes sweeping a Z-height on the semiconductor wafer;
- and
- adjusting focus of the semiconductor review tool to within the Z-height during the review of the semiconductor wafer.
1 more element
A non-transitory computer-readable storage medium, comprising one or more programs for executing the following steps on one or more computing devices:
- receiving absolute Z-height values with respect to a tool component of a semiconductor review tool, azimuthal angle values, and polar angle values for a semiconductor wafer;
- and
- sending instructions to review the semiconductor wafer with a particle beam within a Z-height based on the absolute Z-height values at locations of the azimuthal angle values and the polar angle values;
- and
- adjusting focus of the semiconductor review tool to within the Z-height during the review of the semiconductor wafer.
2 more elements
Dependencies are inferred from the claim text.