Semiconductor device and method for manufacturing the semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Tetsuya Kakehata, Yuji Egi, Yasuhiro Jinbo, Yujiro Sakurada
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Abstract
A semiconductor device having favorable electrical characteristics is provided. A metal oxide is formed over a substrate by the steps of: introducing a first precursor into a chamber in which the substrate is provided; introducing a first oxidizer after the introduction of the first precursor; introducing a second precursor after the introduction of the first oxidizer; and introducing a second oxidizer after the introduction of the second precursor.
Claims19
A method for manufacturing a semiconductor device,
- wherein a metal oxide comprising indium and zinc is formed over a substrate by the steps of:
- introducing a first precursor into a chamber in which the substrate is provided;
- performing a first evacuation after the introduction of the first precursor;
- introducing a first oxidizer after the first evacuation;
- performing a second evacuation after the introduction of the first oxidizer;
- introducing a second precursor after the second evacuation;
- and
- introducing a second oxidizer after the introduction of the second precursor.
A method for manufacturing a semiconductor device,
- wherein a metal oxide comprising indium and zinc is formed over a substrate by the steps of:
- introducing a first precursor into a chamber in which the substrate is provided;
- performing a first evacuation after the introduction of the first precursor;
- introducing a first oxidizer after the first evacuation;
- performing a second evacuation after the introduction of the first oxidizer;
- introducing a second precursor after the second evacuation;
- introducing a second oxidizer after the introduction of the second precursor;
- introducing a third precursor after the introduction of the second oxidizer;
- and
- introducing a third oxidizer after the introduction of the third precursor.
Dependencies are inferred from the claim text.