RF voltage and current (V-I) sensors and measurement methods

A radio frequency (RF) system comprising:

• a radio frequency (RF) power source configured to power a load with an RF signal;
• an RF pipe comprising an inner conductor and an outer conductor connected to ground coupling the RF power source to the load;
• a current sensor aligned to a central axis of the RF pipe carrying the RF signal, the current sensor being configured to monitor the current of the RF signal, the current sensor comprising a conductive half-loop disposed proximate the RF pipe, the conductive half-loop comprising a first end and an opposite second end, the current sensor being configured to output an output signal between the first end and the second end;
• a sensor casing disposed around the RF pipe, wherein the sensor casing comprises a conductive material connected to the outer conductor of the RF pipe;
• a gallery disposed within the sensor casing and outside the outer conductor of the RF pipe, wherein the current sensor is disposed in the gallery;
• and
• a slit in the outer conductor of the RF pipe to expose the current sensor to a magnetic field due to the current of the RF signal in the inner conductor of the RF pipe.