Plasma processing apparatus
AssigneeCanon Anelva Corporation
InventorsAtsushi Takeda, Takayuki Moriwaki, Tadashi Inoue, Masaharu Tanabe, Kazunari Sekiya, Hiroshi Sasamoto, Tatsunori Sato, Nobuaki Tsuchiya
Life of this patent
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Abstract
A plasma processing apparatus includes a balun having a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal, a grounded vacuum container, a first electrode electrically connected to the first balanced terminal, a second electrode electrically connected to the second balanced terminal, and a ground electrode arranged in the vacuum container and grounded.
Claims19
A plasma processing apparatus comprising:
- a balun including a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal;
- a grounded vacuum container;
- a first electrode electrically connected to the first balanced terminal;
- a second electrode electrically connected to the second balanced terminal;
- and
- a ground electrode arranged in the vacuum container and grounded,
- wherein the ground electrode includes a plurality of plate portions arranged to be parallel to each other.
A plasma processing apparatus comprising:
- a balun including a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal;
- a grounded vacuum container;
- a first electrode electrically connected to the first balanced terminal;
- a second electrode electrically connected to the second balanced terminal;
- and
- a ground electrode arranged in the vacuum container and grounded,
- wherein the ground electrode has a comb-tooth shape in a section.
A plasma processing apparatus comprising:
- a balun including a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal;
- a grounded vacuum container formed by a conductor;
- a first electrode electrically connected to the first balanced terminal;
- a second electrode electrically connected to the second balanced terminal;
- and
- a ground electrode arranged in the vacuum container and grounded;
- wherein the balun includes a first coil configured to connect the first unbalanced terminal and the first balanced terminal, and a second coil configured to connect the second unbalanced terminal and the second balanced terminal, a third coil and a fourth coil both of which are connected between the first balanced terminal and the second balanced terminal, and the third coil and the fourth coil are configured to set, as a midpoint between a voltage of the first balanced terminal and a voltage of the second balanced terminal, a voltage of a connection node of the third coil and the fourth coil.
Dependencies are inferred from the claim text.