Multi channel splitter spool

A system of gas lines for supplying a gas to a process chamber, comprising:

• a first gas line configured to transport a first gas, the first gas line having a first diameter;
• a spool with a plurality of second gas lines coupled to the first gas line, each of the plurality of second gas lines configured to transport the first gas, and each of the plurality of second gas lines having a second diameter;
• a third gas line configured to transport a second gas;
• a fourth gas line coupled to the spool at a first junction and coupled to the third gas line at a second junction;
• and
• a first heater jacket surrounding the spool, a second heater jacket surrounding each of the second gas lines, a third heater jacket surrounding the third gas line, and a fourth heater jacket surrounding the fourth gas line;
• wherein the second diameter is smaller than the first diameter;
• and
• wherein each respective heater jacket is configured to heat the plurality of second gas lines, the third gas line, and the fourth gas line at substantially similar temperatures.

A system for processing a semiconductor substrate, comprising:

• a process chamber;
• a first gas line configured to transport a first gas, the first gas line having a first diameter;
• a spool with a plurality of second gas lines coupled to the first gas line, each of the plurality of second gas lines configured to transport the first gas and each of the plurality of second gas lines having a second diameter;
• a third gas line configured to transport a second gas;
• a fourth gas line coupled to the spool at a first junction, coupled to the third gas line at a second junction, and coupled to the process chamber at a third junction;
• and
• a first heater jacket surrounding the spool, a second heater jacket surrounding each of the second gas lines, a third heater jacket surrounding the third gas line, and a fourth heater jacket surrounding the fourth gas line;
• wherein the second diameter is smaller than the first diameter;
• and
• wherein the heater jacket is configured to heat the plurality of second gas lines, the third gas line, and the fourth gas line at substantially similar temperatures.