Method for auto-tuning and process performance assessment of chamber control
AssigneeApplied Materials, Inc.
InventorsMauro Cimino, Arkaprava Dan, Sanjeev Baluja
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Abstract
Embodiments disclosed herein include a method for auto-tuning a system. In an embodiment, the method comprises determining if the system is in a steady state. Thereafter, the method includes exciting the system. In an embodiment, the method comprises storing process feedback measurements from the excited system to provide a set of stored data. In an embodiment, the set of stored data is a subset of all available data generated by the excited system. In an embodiment, the method further comprises determining when the excited system returns to the steady state, and tuning the system using the set of stored data.
Claims20
A method for auto-tuning a system, comprising:
- determining if the system is in a steady state;
- exciting the system;
- storing process feedback measurements from the excited system to provide a set of stored data, wherein the set of stored data is a subset of all past and present collected data generated by the excited system;
- determining when the excited system returns to the steady state;
- and tuning the system using the set of stored data;
- wherein the storing, determining, and tuning is performed based on a rectangle box approach that takes into consideration dimensions and orientations of rectangle boxes.
A method of monitoring a recipe performance in a semiconductor processing tool, comprising:
- determining a level of noise in a system;
- storing process feedback measurements from the system to provide a set of stored data, wherein the set of stored data is a subset of all past and present collected data generated by the system;
- and comparing the set of stored data with a set of reference data;
- determining when the system returns to steady state;
- and tuning the system using the set of stored data;
- wherein the storing, determining, and tuning is performed based on a rectangle box approach that takes into consideration dimensions and orientations of rectangle boxes.
A semiconductor processing tool, comprising:
- a chamber;
- a plurality of components interfacing with the chamber, wherein each of the components are controlled with a different closed loop control system, wherein the processing tool comprises an auto-tuning module for tuning the closed loop control systems, wherein the auto-tuning module comprises:
- a noise estimation module, wherein the noise estimation module determines the noise present in each closed loop control system;
- and a data collection module, wherein the data collection module stores process feedback measurements from the closed loop control systems to provide a set of stored data for each closed loop control system, wherein the sets of stored data are a subset of all past and present collected data generated by the closed loop control systems;
- wherein when the closed loop control systems return to steady state the closed loop control systems are tuned using the set of stored data;
- wherein the storing and tuning is performed based on a rectangle box approach that takes into consideration dimensions and orientations of rectangle boxes.
Dependencies are inferred from the claim text.