Target debris collection device and extreme ultraviolet light source apparatus including the same

An extreme ultraviolet light source apparatus, comprising:

• a collector included in a vessel, the collector configured to reflect extreme ultraviolet light;
• and
• a target debris collection device configured to collect target material debris within the vessel,
• the target debris collection device comprises,
• a baffle body between the collector and an outlet port of the vessel, the baffle body configured to allow the extreme ultraviolet light reflected from the collector to pass through an internal transmissive region of the baffle body;
• a discharge plate provided in a first end portion of the baffle body adjacent to the collector, the discharge plate configured to collect the target material debris within the baffle body;
• a guide structure configured to guide the target material debris collected in the discharge plate to a collection tank, the guide structure having a length between 100 mm and 300 mm;
• a discharge nozzle installed in a discharge hole formed in the discharge plate, the discharge nozzle configured to be connected to the guide structure;
• a first heating member provided in the guide structure, the first heating member configured to heat the target material debris;
• and
• a second heating member provided in the discharge nozzle, the second heating member configured to heat the target material debris.

A target debris collection device for extreme ultraviolet light source apparatus, comprising:

• a baffle body extending within an extreme ultraviolet (EUV) vessel between a collector and an outlet port of the EUV vessel, the baffle body configured to allow extreme ultraviolet light reflected from the collector to pass through an internal transmissive region of the baffle body;
• a discharge plate provided in a first end portion of the baffle body adjacent to the collector, the discharge plate configured to collect target material debris on an inner surface of the baffle body;
• a guide structure configured to guide the target material debris collected in the discharge plate to a collection tank;
• a discharge nozzle installed in a discharge hole formed in the discharge plate, the discharge nozzle configured to be connected to the guide structure;
• and
• a first heating member provided in the guide structure, the first heating member configured to heat the target material debris;
• and
• a second heating member provided in a passage of the discharge plate, the second heating member configured to heat the target material debris.