Reticle transfer device and exposure system
AssigneeChangxin Memory Technologies, Inc.
InventorZicheng Liu
Life of this patent
Estimating the term…
Abstract
Provide are a reticle transfer device and an exposure system. The reticle transfer device includes a bearing member, a light source, a light detector and a controller. The bearing member is configured to bear the reticle, and the light source is configured to emit irradiation light to the reticle and form reflected light. The light detector is configured to obtain the reflected light and generate a light detection signal. The controller is configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal. The reticle transfer device can determine whether particulate matter exists on the surface of the reticle in real time based on the light detection signal.
Claims16
A reticle transfer device, configured to convey a reticle between different components, and comprising:
- a bearing member, configured to bear the reticle;
- a light source, the light source being arranged on, a side for bearing the reticle, of the bearing member, to emit an irradiation light to the reticle, wherein a reflected light is formed when the irradiation light is irradiated onto the reticle;
- a light detector, configured to obtain the reflected light and generate a light detection signal based on the reflected light;
- and
- a controller, electrically connected to the light detector and configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal,
- wherein the reticle transfer device further comprises a base and a mechanical member, an end part of one end of the mechanical member being fixed to the base, an end part of the other end of the mechanical member being connected to the bearing member, the mechanical member and the bearing member together forming a mechanical arm, the mechanical member being configured to move along a first preset path to convey the reticle between the different components, the light source being connected to the mechanical member.
An exposure system, comprising a plurality of components and a plurality of reticle transfer devices configured to convey at least one reticle between different components,
- wherein each of the reticle transfer devices comprises:
- a bearing member, configured to bear a reticle;
- a light source, the light source being arranged on, a side for bearing the reticle, of the bearing member, to emit an irradiation light to the reticle, wherein a reflected light is formed when the irradiation light is irradiated onto the reticle;
- a light detector, configured to obtain the reflected light and generate a light detection signal based on the reflected light;
- and
- a controller, electrically connected to the light detector and configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal,.
- wherein the reticle transfer device further comprises a base and a mechanical member, an end part of one end of the mechanical member being fixed to the base, an end part of the other end of the mechanical member being connected to the bearing member, the mechanical member and the bearing member together forming a mechanical arm, the mechanical member being configured to move along a preset path to convey the reticle between the different components, the light source being connected to the mechanical member.
Dependencies are inferred from the claim text.