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US 11,598,980 B2Granted
Micro-machined thin film lithium niobate electro-optic devices
AssigneePresident and Fellows of Harvard College
InventorsCheng Wang, Mian Zhang, Marko Loncar
Life of this patent
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Abstract
Optical devices and their fabrication from thin film lithium niobate are provided. In some embodiments, an optical device includes a substrate and an optical waveguide disposed on the substrate. The optical waveguide comprises lithium niobate. The optical waveguide has a central ridge extending laterally along the substrate. A pair of electrodes is disposed on opposite sides of the central ridge of the optical waveguide.
Claims29
A device comprising:
- a substrate having a first side;
- a lithium niobate optical waveguide disposed on the first side of the substrate, the optical waveguide comprising:
- a central ridge;
- and
- legs extending outwards from the central ridge along the first side of the substrate,
- wherein the central ridge consists essentially of undoped lithium niobate,
- the device further comprising a pair of electrodes disposed on the first side of the substrate such that each of the legs of the optical waveguide extends from the central ridge to one of the pair of electrodes,
- wherein the optical waveguide comprises a substantially semicircular bend having a radius of about 50 μm or less.
5 more elements
A device comprising:
- a substrate having a first side;
- a lithium niobate optical waveguide disposed on the first side of the substrate, the optical waveguide comprising:
- a central ridge, and
- legs extending outwards from the central ridge along the first side of the substrate,
- wherein the central ridge consists essentially of undoped lithium niobate,
- the device further comprising a pair of electrodes disposed on the first side of the substrate such that each of the legs of the optical waveguide extends from the central ridge to one of the pair of electrodes,
- wherein the optical waveguide is disposed along a substantially serpentine path defined by a plurality of arcuate segments,
- wherein each of the arcuate segments has a radius of less than about 50 μm.
5 more elements
Dependencies are inferred from the claim text.