Devices for thermally actuating deformable mirror, and associated manufacturing methods
AssigneeCoherent LaserSystems GmbH & Co. KG
InventorRüdiger Von Elm
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AssigneeCoherent LaserSystems GmbH & Co. KG
InventorRüdiger Von Elm
Estimating the term…
A device for thermally actuating a deformable mirror includes a monolithic block that includes a mirror plate having a front face forming or configured to support a mirror, a base, and a one-dimensional array of thermally expandable actuators. The thermally expandable actuators mechanically connect a rear face of the mirror plate to the base such that shape, tilt, and/or location of the front face depend on temperature of the thermally expandable actuators. The mirror plate, base, and thermally expandable actuators are defined by slits that span between opposite-facing top and bottom surfaces of the monolithic block. The monolithic block may be made of a metal and may be manufactured at relatively low cost by wire eroding the slits in a metal block, using a wire that passes through the metal block between its top and bottom surfaces.
A device for thermally actuating a deformable mirror, comprising:
A device for thermally actuating a deformable mirror, comprising:
Dependencies are inferred from the claim text.