Optical unit
AssigneeHamamatsu Photonics K.K.
InventorsYuki Morinaga, Anna Yoshida, Yoshihisa Warashina
Life of this patent
Estimating the term…
Abstract
An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
Claims11
An optical unit comprising:
- a base which includes a main surface;
- a mirror device which includes a movable mirror portion and is disposed on the main surface;
- a frame member that is provided on the main surface side so as to surround the mirror device;
- and
- a window member that is bonded to the frame member,
- wherein the frame member includes a first wall portion, a second wall portion, and a third wall portions which are provided on the main surface side,
- wherein the second wall portion is disposed so as to face the first wall portion,
- wherein the third wall portion is connected to an end of the first wall portion and to an end of the second wall portion to form corner portions of the frame member, and
- wherein, in planer view, inner side surfaces of the corner portions have a curved surface shape.
Dependencies are inferred from the claim text.