Opto-mechanical transducer apparatus and corresponding method

A method of operating an opto-mechanical apparatus comprising an optically transparent substrate having a first surface and a second surface opposed to the first surface, a piezoelectric membrane arranged at the first surface, at least one reflective facet facing the substrate arranged at the piezoelectric membrane, and an optical element having an input end, and an output end coupled to the second surface of the optically transparent substrate, the method comprising:

• receiving, by the input end of the optical element, a light beam directed toward the at least one reflective facet;
• guiding, by the optical element, the light beam towards the output end of the optical element;
• oscillating, by the piezoelectric membrane, in response to the light beam propagating through the optically transparent substrate and impinging onto the piezoelectric membrane;
• guiding, by the optical element, light reflected from the at least one reflective facet to the input end of the optical element;
• sensing the light reflected to the input end of the optical element;
• and
• aligning the optical element with respect to a focal point at the piezoelectric membrane as a function of the sensed reflected light.

An apparatus, comprising:

• an optically transparent substrate comprising:
• a first surface;
• and
• a second surface opposite the first surface;
• a piezoelectric membrane disposed at the first surface of the optically transparent substrate;
• at least one reflective facet disposed at the piezoelectric membrane or in a same plane by a side of the piezoelectric membrane, and facing the optically transparent substrate;
• and
• an optical element comprising:
• an input end configured to receive a light beam;
• an output end coupled to the second surface of the optically transparent substrate;
• a light focusing lens having a focal point for the light beam at the piezoelectric membrane;
• and
• a light collimating lens oriented to collimate the light beam onto the at least one reflective facet for reflection back to the input end.