US 11,598,918 B2 · Loopback waveguide

Abstract

A structure for, and method of, forming a first optoelectronic circuitry that generates an optical signal, a second optoelectronic circuitry that receives an optical signal, and a loopback waveguide that connects the output from the first optoelectronic circuitry to the second optoelectronic circuitry on an interposer substrate are described. The connected circuits, together comprising a photonic integrated circuit, are electrically tested using electrical signals that are provided via probing contact pads on the PIC die. Electrical activation of the optoelectrical sending devices and the subsequent detection and measurement of the optical signals in the receiving devices, in embodiments, provides information on the operability or functionality of the PIC on the die at the wafer level, prior to die separation or singulation, using the electrical and optical components of the PIC circuit.

Claims20

Dependent claims

An optoelectronic circuit comprising

an emitter circuit,
wherein the emitter circuit comprises multiple laser devices coupled to a multiplexor to generate a composite optical signal comprising multiple individual optical signals having different wavelengths to an output waveguide;
a receiver circuit,
wherein the receiver circuit is configured to receive and process an optical signal received from an input waveguide,
wherein the output waveguide is optically coupled to the input waveguide through a sacrificial optical circuit,
wherein the sacrificial optical circuit is configured for testing, using an electrical tester, the emitter circuit and the receiver circuit,
wherein the electrical tester is configured to provide power to the multiple laser devices to emit the multiple individual optical signals,
wherein the sacrificial optical circuit is configured to be removed in a subsequent fabrication step after the testing step.

5 more elements

Multiple optoelectronic circuits fabricated on a substrate, each optoelectronic circuit comprising

an emitter circuit,
wherein the emitter circuit comprises multiple laser devices coupled to a multiplexor to generate a composite optical signal comprising first multiple individual optical signals having first different wavelengths to an output waveguide;
a receiver circuit,
wherein the receiver circuit comprises a demultiplexor, configured to receive an optical signal received from an input waveguide,
wherein the demultiplexor is configured to process the optical signal to generate second multiple individual optical signals having second different wavelengths;
a sacrificial optical circuit,
wherein the sacrificial optical circuit comprises an entrance optically coupled to the output waveguide,
wherein the sacrificial optical circuit comprises an exit optically coupled to the input waveguide,
wherein the sacrificial optical circuit is configured for testing, using an electrical tester, the emitter circuit and the receiver circuit,
wherein the electrical tester is configured to provide power to the multiple laser devices to emit the first multiple individual optical signals,
wherein at least part of the sacrificial optical circuit is configured to be removed in a subsequent fabrication step after the testing step.

8 more elements

An optoelectronic circuit comprising

an emitter circuit,
wherein the emitter circuit comprises a laser device configured to emit a first optical signal to an output waveguide;
a receiver circuit,
wherein the receiver circuit comprises an optoelectronic device,
wherein the optoelectronic device is configured to receive a second optical signal received from an input waveguide,
wherein the optoelectronic device is configured to process the second optical signal and to generate an electrical signal corresponded to the second optical signal,
wherein the output waveguide is optically coupled to the input waveguide through a sacrificial optical circuit,
wherein the sacrificial optical circuit is configured for testing, using an electrical tester, the emitter circuit and the receiver circuit,
wherein the electrical tester is configured to provide power to the laser device for the laser device to emit the first optical signal,
wherein the electrical tester is configured to measure the electrical signal,
wherein the sacrificial optical circuit is configured to be removed in a subsequent fabrication step after the testing step.

8 more elements

Dependencies are inferred from the claim text.

Loopback waveguide

Life of this patent

Loopback waveguide

Life of this patent

Abstract

Claims20