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US 11,598,905 B2Granted
Inverted nanocone structure for optical device and method of producing the same
AssigneeKorea Institute of Science and Technology
InventorsSang Wook Han, Seung Woo Jeon, Sung Wook Moon, Yong Su Kim, Hyang Tag Lim, Ho Joong Jung, Young Wook Cho
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Abstract
An inverted nanocone structure of the present disclosure includes a first surface, a second surface spaced apart from the first surface by a predetermined distance and having a greater area than the first surface, and a body having an inverted cone shape between the first surface and the second surface, wherein at least one activated point defect center is provided in the body.
Claims5
A method of producing an inverted nanocone structure, the method comprising:
- preparing a base material;
- forming a nitrogen vacancy by injecting nitrogen ions into the base material and annealing the base material;
- forming a nanostructure having a cylindrical shape by patterning a mask in a circular shape and using an anisotropic etching process;
- and
- forming an inverted nanocone structure by etching a first surface of the cylindrical shape, which is in contact with the base material, more than a second surface, which is an upper portion of the cylindrical shape;
- wherein, in the forming of the inverted nanocone structure, dry etching is performed using a Faraday cage for producing an inverted nanocone structure, and
- wherein the Faraday cage has:
- an upper open part and a lower open part disposed on an upper portion and a lower portion thereof, respectively;
- a cone shape, in which the lower open part has a greater area than the upper open part, with a predetermined thickness;
- and
- a perimeter in which a number of holes are arranged.
8 more elements
Dependencies are inferred from the claim text.