Sensor
AssigneeKabushiki Kaisha Toshiba
InventorHiroaki Yamazaki
Life of this patent
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Abstract
According to one embodiment, a sensor includes a sensor part and a first circuit. The sensor part includes a base body, a fixed electrode fixed to the base body, a supporter fixed to the base body, and a movable part supported by the supporter. The movable part includes a movable region including a movable electrode facing the fixed electrode, and a first support region provided between the movable region and the supporter. The first support region includes a first electrode, and a second electrode insulated from the first electrode. The first circuit is configured to perform a first operation of applying a voltage between the first electrode and the second electrode.
Claims20
A sensor, comprising:
- a sensor part including
- a base body,
- a fixed electrode fixed to the base body,
- a supporter fixed to the base body, and
- a movable part supported by the supporter;
- and
- a first circuit,
- the movable part including
- a movable region including a movable electrode facing the fixed electrode, and
- a first support region provided between the movable region and the supporter,
- the first support region including
- a first electrode, and
- a second electrode insulated from the first electrode,
- the first circuit being configured to perform a first operation of applying a voltage between the first electrode and the second electrode.
Dependencies are inferred from the claim text.