Tungsten trioxide/silicon nanocomposite structure, method for manufacturing the same and gas sensing device having the same
AssigneeNational Cheng Kung University
InventorsChia-Yun Chen, Po-Hsuan Hsiao, Pin-Ju Chien
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Abstract
A method for manufacturing a tungsten trioxide/silicon nanocomposite structure includes steps as follows. A silicon substrate is provided, wherein a surface of the silicon substrate is formed with a plurality of microstructures. A tungsten trioxide precursor solution is provided, wherein the tungsten trioxide precursor solution is contacted with the silicon substrate. A hydrothermal synthesis step is conducted, wherein the tungsten trioxide precursor solution is reacted to form a plurality of tungsten trioxide particles on the plurality of microstructures, so as to obtain the tungsten trioxide/silicon nanocomposite structure.
Claims19
A method for manufacturing a tungsten trioxide/silicon nanocomposite structure, comprising:
- providing a silicon substrate, wherein a surface of the silicon substrate is formed with a plurality of microstructures;
- providing a tungsten trioxide precursor solution, wherein the tungsten trioxide precursor solution is contacted with the silicon substrate;
- conducting a hydrothermal synthesis step, wherein the tungsten trioxide precursor solution is reacted to form a plurality of tungsten trioxide particles on the plurality of microstructures, so as to obtain the tungsten trioxide/silicon nanocomposite structure;
- and
- conducting a plasma modification step, wherein a surface of the tungsten trioxide/silicon nanocomposite structure is modified by an oxygen-containing plasma.
Dependencies are inferred from the claim text.