Imaging system and method for specimen detection

A method for specimen detection, applied to an imaging system, wherein the imaging system comprises:

• a micro computed tomography (micro-CT) subsystem, a scanning electron microscopy (SEM), a processor, and a specimen processing subsystem comprising a focused ion beam subsystem and a mechanical cutting device;
• the method comprises:
• acquiring, by the micro-CT subsystem, a three-dimensional image of a specimen;
• acquiring, by the processor, location information of a target area based on the three-dimensional image;
• processing, by at least one of the focused ion beam subsystem or the mechanical cutting device, the specimen based on the location information for multiple times, to expose a target section of the target area;
• acquiring, by the SEM, two-dimensional images of a plurality of target sections resulted from the multiple times of processing;
• and
• performing, by the processor, three-dimensional reconstruction on the obtained two-dimensional images to obtain a three-dimensional image of the target area.