Thickness-shear mode resonators
AssigneePrecis LLC
InventorsScott Brown, Lon Perry
Life of this patent
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Abstract
A pressure sensor that resonates in the thickness-shear mode (TSM) includes a center resonator structure, a first electrode positioned on a first side of the center resonator structure, and a first electrode flag. The first electrode flag forms a first electrically conductive path from the first electrode toward an outer portion of the center resonator structure. The first electrode flag extends at least partially over the first side of the center resonator structure. The first electrode flag also includes one or more first tab metals migrated thereinto from opposing sides of the first electrode flag.
Claims17
A pressure sensor that resonates in a thickness-shear mode (TSM), comprising:
- a center resonator structure;
- a first electrode positioned on a first side of the center resonator structure;
- and
- a first electrode flag forming a first electrically conductive path from the first electrode toward an outer portion of the center resonator structure, the first electrode flag extending at least partially over the first side of the center resonator structure, the first electrode flag comprising one or more first tab metals migrated thereinto from opposing sides of the first electrode flag.
A method for creating a quartz pressure sensor that resonates in a thickness-shear mode (TSM), the method comprising:
- obtaining a center resonator structure;
- arranging a first underlying tab to a first side of the center resonator structure;
- arranging a first electrode flag to extend over the first underlying tab from a first electrode positioned on the first side of the center resonator structure, thereby causing the first underlying tab to be positioned between the first electrode flag and the center resonator structure;
- arranging a first overlaying tab over the first electrode flag such that the first overlaying tab and the first underlying tab become arranged on opposing sides of the first electrode flag;
- causing tab metal from the first underlying tab to migrate into the first electrode flag;
- and
- causing tab metal from the first overlaying tab to migrate into the first electrode flag.
Dependencies are inferred from the claim text.