Plasmonically enhanced, ultra-sensitive bolometric mid-infrared detector
AssigneeThe Regents of the University of California
InventorsMohammad Wahiduzzaman Khan, Ozdal Boyraz, Jonathan Sullivan, Jaeho Lee, Ziqi Yu
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Abstract
The present invention features a novel design for a bolometric infrared detector focused on LWIR range for human body high-resolution temperature sensing. The present invention incorporates an efficient plasmonic absorber and VO2 nanobeam to facilitate improvement in both aspects—thermal resolution and spatial resolution. The present invention significantly improves the detectivity, NETD, and responsivity for a smaller form-factor detector active area.
Claims20
An infrared detection device (100), the device comprising:
- a) a radiation absorber (120) comprising:
- i) a support structure (110);
- ii) a first metal layer (121) disposed on the support structure (110);
- iii) an insulator layer (122) disposed on the first metal layer (121), wherein the first metal layer (121) is sandwiched between the support structure (110) and the insulator layer (122);
- and
- iv) a second metal layer (123) disposed on the insulator layer, wherein the second metal layer (123) is patterned;
- and
- b) a high-temperature coefficient of resistance (TCR) nanobeam (130) embedded within the radiation absorber (120).
An infrared detection device (100), the device comprising:
- a) a radiation absorber (120), wherein the radiation absorber comprises:
- i) a support structure (110);
- and
- ii) a plurality of alternating metal and insulator layers disposed on the support structure (110);
- and
- b) a high-temperature coefficient of resistance (TCR) nanobeam (130) embedded within the radiation absorber (120).
Dependencies are inferred from the claim text.