Optical displacement sensor
AssigneeMitutoyo Corporation
InventorAkihide Kimura
Life of this patent
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AssigneeMitutoyo Corporation
InventorAkihide Kimura
Estimating the term…
An optical displacement sensor includes: a splitting unit that splits the light radiated from the light source into a first light ray and a second light ray; a reflection unit including a first reflection part and a second reflection part provided at a predetermined angle with respect to the first reflection part; and a fold-back reflection unit that folds-back and reflects the light that has gone through the reflection unit to the reflection unit. The optical displacement sensor is characterized in that the reflection unit reflects the first light ray and the second light ray that are split by the splitting unit and have gone through the diffraction unit from the first reflection part to the second reflection part, and reflects the first light ray and the second light ray that are reflected by the fold-back reflection unit from the second reflection part to the first reflection part.
An optical displacement sensor comprising:
An optical displacement sensor comprising:
Dependencies are inferred from the claim text.