Apparatus and method for deformation measurement
AssigneeAdvanced Semiconductor Engineering, Inc.
InventorsHsuan-Yu Chen, Ming-Han Wang
Life of this patent
Estimating the term…
Abstract
An apparatus for deformation measurement and a method for deformation measurement are provided. The apparatus includes a housing, a sample holder, a moving mechanism, a first heating device and a second heating device. The sample holder is in the housing. The moving mechanism is over the sample holder. The first heating device is on the moving mechanism. The second heating device is below the sample holder.
Claims18
An apparatus for deformation measurement, comprising:
- a housing;
- a sample holder in the housing;
- a moving mechanism over the sample holder;
- a first heating device on the moving mechanism;
- a second heating device below the sample holder;
- and
- a temperature sensor disposed adjacent to the sample holder and configured to control the first heating device and/or the second heating device, wherein the temperature sensor is configured to be disposed on a dummy sample proximal to a sample to be measured.
An apparatus for deformation measurement, comprising:
- a housing;
- a sample holder in the housing;
- a moving mechanism over the sample holder;
- a first heating device on the moving mechanism;
- and
- a second heating device below the sample holder;
- wherein the sample holder comprises a plurality of bars arrange in parallel configured to carry a sample and expose a portion of the sample to the second heating device;
- and
- wherein a distance between the adjacent bars is greater than a width of each of the bars.
An apparatus for deformation measurement, comprising:
- a housing;
- a sample holder in the housing:
- a moving mechanism over the sample holder, the moving mechanism comprising:
- a sliding rail attached to the housing;
- and
- a support structure movably connected to the sliding rail;
- a first heating device on the moving mechanism, wherein the first heating device is coupled to the sliding rail;
- and
- a second heating device below the sample holder;
- wherein a portion of the sliding rail overlaps a portion of a cover over the sample holder, wherein the cover is transparent to a peak wavelength emitted or to be received by an image sensor outside the housing.
An apparatus for deformation measurement, comprising:
- a housing;
- a sample holder in the housing;
- a moving mechanism over the sample holder;
- a first heating device on the moving mechanism;
- a second heating device below the sample holder;
- and
- a heat retardation plate, wherein the first heating device is between the sample holder and the heat retardation plate.
An apparatus for deformation measurement, comprising:
- a housing;
- a sample holder in the housing;
- a moving mechanism over the sample holder;
- a first heating device on the moving mechanism;
- a second heating device below the sample holder;
- and
- a cooling device disposed over the sample holder for providing liquid nitrogen to fill in the housing;
- wherein the cooling device comprises a plurality of tubes, each of the tubes including a plurality of outlets, and the outlets are disposed between quartz tubes of the first heating device.
Dependencies are inferred from the claim text.