Cooling apparatus having multiple evaporators for cooling objects having different amounts of heat generation, exposure apparatus including cooling apparatus, and industrial apparatus including cooling apparatus

A cooling apparatus comprising:

• a compressor configured to compress coolant;
• a first flow path and a second flow path branched from a branch point, the branch point being disposed downstream of the compressor and configured to split compressed coolant toward the first and second flow paths;
• a condenser disposed downstream of the branch point in the first flow path and configured to condense compressed coolant;
• a first decompressor disposed downstream of the condenser and configured to decompress condensed coolant;
• three or more evaporators disposed downstream of the first decompressor and connected in series with each other such that the evaporators cool different objects to be cooled;
• a second decompressor disposed downstream of the branch point in the second flow path and configured to decompress compressed coolant;
• a return path configured to return coolant that flows out of a most downstream evaporator of the three or more evaporators, to the compressor;
• a first temperature detector configured to detect a temperature of an object cooled by the most downstream evaporator of the three or more evaporators;
• a detection unit configured to detect a temperature and/or a pressure of the coolant that flows out of the most downstream evaporator of the three or more evaporators;
• and
• a control unit,
• wherein the second flow path comprises a hot-gas flow path configured to extend directly from an outlet of the second decompressor to a sole meeting point with the first flow path, the sole meeting point being positioned downstream of at least one of the evaporators and between the most downstream evaporator and a second-most downstream evaporator of the three or more evaporators, and
• wherein the control unit is configured to control a degree of opening of the second decompressor depending on the temperature detected by the first temperature detector and control a degree of opening of the first decompressor depending on the temperature and/or the pressure detected by the detection unit.