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US 11,597,994 B2Granted
Method of manufacturing display apparatus
AssigneeSamsung Display Co., Ltd.
InventorsKyubum Kim, Sungjin Kim, Chunyoung Park, Uno Chang
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.
Claims5
A method of manufacturing a display apparatus, the method comprising:
- sequentially fixing a display substrate and a mask assembly to a carrier;
- transporting the mask assembly and the display substrate to a deposition unit via the carrier;
- and
- depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit,
- wherein the carrier comprises:
- a body portion;
- an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix the mask assembly;
- and
- a substrate fixing unit arranged in the body portion to selectively fix the display substrate.
6 more elements
Dependencies are inferred from the claim text.