SiC member
AssigneeAdmap Inc.
InventorZhida Wang
Life of this patent
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Abstract
A technology for securing favorable appearance of a SiC member, the SiC member includes: a first SiC layer having a first upper surface having a concavo-convex shape and a first lower surface; and a second SiC layer having a second upper surface and a second lower surface, the second lower surface being in contact with the first upper surface and having a concavo-convex shape corresponding to that of the first upper surface. The second SiC layer has a recess concaved from the second upper surface toward the second lower surface side and a flat bottom surface, and the bottom surface of the recess is placed upward of the second lower surface.
Claims4
A SiC member comprising:
- a first SiC layer having a first upper surface having a concavo-convex shape and a first lower surface;
- and
- a second SiC layer having a second upper surface and a second lower surface, the second lower surface being in contact with the first upper surface and having a concavo-convex shape corresponding to the concavo-convex shape of the first upper surface,
- wherein the second SiC layer has a recess concaved from the second upper surface toward the second lower surface side and a flat bottom surface, and
- the bottom surface of the recess is placed upward of the second lower surface, and
- wherein the SiC member is a susceptor having the recess as a housing portion for housing a wafer.
Dependencies are inferred from the claim text.