Packaged die and assembling method
AssigneeTDK Corporation
InventorsAndreas Barbul, Matthias Schmidt, Matthias König
Life of this patent
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Abstract
In an embodiment A package includes a casing having an opening and enclosing a cavity, a die accommodated in the cavity and a membrane attached to the casing, the membrane being air-permeable, covering and sealing the opening, wherein the membrane is configured to allow only a lateral gas flow, and wherein a blocking member is configured to block a vertical gas flow through the membrane into the cavity, the blocking member tightly covering a surface of the membrane at least in an area comprising the opening.
Claims19
A package comprising:
- a casing having an opening and enclosing a cavity;
- a die accommodated in the cavity;
- and
- a membrane attached to the casing, the membrane being air-permeable, covering and sealing the opening,
- wherein the membrane is configured to allow gas to flow into the cavity mainly in a lateral direction, and
- wherein a blocking member tightly covers a surface of the membrane vertically adjacent to the opening so that the blocking member is configured to block a vertical gas flow through the membrane towards the blocking member.
A method for assembling a package, the method comprising:
- providing a die comprising bond pads;
- providing a substrate and a lid, both being part of a casing that encloses a cavity, wherein the lid comprises an open side;
- arranging a membrane onto a surface of the substrate;
- arranging the die in the casing;
- and
- attaching the substrate with attached membrane on the open side of the lid such that the membrane covers an opening between the substrate and the lid thereby closing the casing and enclosing the die.
A method for assembling a package, the method comprising:
- providing a die comprising bond pads;
- providing a substrate and a lid, both being part of a casing that encloses a cavity, wherein the substrate comprises an opening;
- arranging a membrane on the substrate such that the membrane covers the opening in the substrate;
- arranging the die in the casing;
- and
- arranging the lid on the substrate to close the casing, thereby enclosing the die.
Dependencies are inferred from the claim text.