Automated material handling system having carrier pollution management function

An automated material handling system having a function of managing pollution in a carrier, in which a series of processes are performed on a processing material while a carrier in which the processing material is accommodated is being moved to at least one processing equipment of a tool buffer, a stocker, and a load buffer along a rail in a state of being loaded on an unmanned transport vehicle, each of the processing equipment being provided with a plate for seating the carrier, the automated material handling system comprising:

• at least one state detecting sensor disposed inside or outside the carrier to detect an internal state of the carrier including a degree of pollution in the carrier;
• a carrier interface disposed inside or outside the carrier to transmit a carrier state value obtained from the state detecting sensor by communicating with a carrier controller of a corresponding plate while the carrier is seated on the plate;
• a carrier controller including a controller interface disposed on the plate to obtain a carrier state value by communicating with the carrier interface, and a carrier control unit configured to generate carrier management information including the carrier state value obtained through the controller interface and current location information of the carrier and output the carrier management information to a server;
• and
• a server configured to analyze an internal pollution state of the carrier based on the carrier management information provided by the carrier controller,
• wherein the carrier interface includes an RFID tag and the controller interface includes an RFID reader to perform RFID communication with each other,
• wherein the carrier interface includes a smart sensor configured to generate driving power by being charged with an RF signal received from the controller interface through the RFID tag, record a carrier state value received from the state detecting sensor in another storage area of a sensor memory in which a carrier ID is stored in advance, and output tag information including one or more of the carrier ID or the carrier state value stored in the sensor memory through the RFID tag, and
• wherein the RFID reader is disposed on the plate, outputs an RF signal to the RFID tag of the smart sensor, and reads the tag information by RFID.