Carrier head of polishing apparatus and membrane used therein
AssigneeKctech Co., Ltd.
InventorsJun Ho Son, Sung Ho Shin
Life of this patent
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Abstract
Provided are a membrane and carrier head using the membrane for polishing apparatus. The membrane comprises a first fixing flap extending inwards from the upper part of a side portion, a second fixing flap extending upwards from the upper part of the side portion, wherein the second fixing flap has a first inclined part, a second inclined part and a third extending part of extending upwards whereby a compensation force generated by the inclined parts realize the constant pressing force to the edge of a substrate during a polishing process.
Claims7
A membrane of a carrier head for a polishing apparatus, comprising:
- a bottom portion formed of flexible material to press a substrate during a polishing process;
- a side portion formed of at least one material including flexible material and extending from an edge of the membrane bottom portion;
- a first fixing flap extending from an upper part of the side portion with an end to be fixed to the carrier head;
- and
- a second fixing flap formed of flexible material, including a first inclined part formed to be inclined upwardly and radially inwardly and a second inclined part formed to be inclined upwardly and radially outwardly from a top of the first inclined part, wherein the second fixing flap extends from one of the side portion and the first fixing flap,
- wherein the first and second fixing flaps form at least part of a bounder of an auxiliary pressure chamber,
- wherein a first connection part connecting one of the side portion or the second fixing flap to the first fixing flap has a higher rigidity compared with any one of the first inclined part or the second inclined part.
A membrane of a carrier head for a polishing apparatus, comprising:
- a bottom portion formed of flexible material to press a substrate during a polishing process;
- a side portion formed of at least one material including flexible material and extending from an edge of the membrane bottom portion;
- a first fixing flap extending from an upper part of the side portion with an end to be fixed to the carrier head;
- and
- a second fixing flap formed of flexible material, including a first inclined part formed to be inclined upwardly and radially inwardly and a second inclined part formed to be inclined upwardly and radially outwardly from a top of the first inclined part, wherein the second fixing flap extends from one of the side portion and the first fixing flap,
- wherein the first and second fixing flaps form at least part of a boundary of an auxiliary pressure chamber,
- wherein a rotational displacement of the second inclined part is greater than a rotational displacement of the first inclined part when the side portion moves upwards or downwards.
Dependencies are inferred from the claim text.