Mist generator, mist film formation method and mist film formation apparatus
AssigneeNikon Corporation
InventorYasutaka Nishi
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Abstract
A mist generating apparatus sprays a surface of an object (P) to be treated with a carrier gas (CGS) of mist (Mst) of a solution containing fine particles or molecules of a material substance, so that a layer of the material substance is deposited on the surface of the object (P) to be treated. The mist generating device includes a mist generator (14) for atomizing the solution to feed the carrier gas (CGS) containing the mist (Mst), and an ultraviolet irradiator (20B) for applying ultraviolet rays having a wavelength of 400 nm or lower to the mist (Mst) floating in the carrier gas (CGS) in a flow path extending from the mist generator (14) until the carrier gas (CGS) is sprayed on the surface of the object (P) to be treated.
Claims24
A mist deposition apparatus comprising:
- a mist generating section configured to generate mist that contains fine particles or molecules of a material substance;
- a mist spouting section through which the mist generated at the mist generating section flows, the mist spouting section being provided with a nozzle section through which the mist is supplied to an upper side of a substrate;
- a mist recovering section to recover at least a portion of the mist;
- and
- a first light irradiation section configured to irradiate the mist with first light
- wherein the mist spouting section is provided with an opening through which droplets of the mist that has been liquefied on an inner wall of the mist spouting section is discharged from the mist spouting section into the mist recovering section, and
- wherein the mist irradiated with the first light is supplied to the upper side of the substrate through the nozzle section.
Dependencies are inferred from the claim text.