Microfluidic-based apparatus and method for vaporization of liquids

A vaporization apparatus that is placed within a surrounding environment and configured to vaporize liquid into the surrounding environment, comprising;

• at least one liquid source;
• a plurality of vaporization ports that are formed in a planar structure comprising a through hole, the through hole with lateral dimensions ranging from 10 um to 300 um, that is in fluid contact with the liquid source on a first side and a surrounding environment on a second side wherein fluid is transported from the first side of the structure to the second side of the structure through the through hole;
• at least one of a plurality of planar heating elements or a continuous planar heating element, comprising thin film resistive elements formed on a top surface of the planar structure and disposed substantially around at least part of at least one vaporization port;
• at least three electrode leads that are in electrical communication with the plurality of thin-film resistive heating elements, selectively powerable to address at least two groups of thin-film heating elements
• wherein;
• the vaporization ports are grouped into a plurality of clusters;
• the planar structure and the planar heater(s) are microfabricated;
• the size of the ports and the planar structure materials are configured to wick liquid from the liquid source to the ports by surface tension, and
• heat applied from the heating element, through the planar structure to liquid that is in direct contact with the planar structure, vaporizes the liquid thereby releasing vapor through the vaporization ports into the surrounding environment.