Impedance tuners with linear actuators
AssigneeMaury Microwave, Inc.
InventorsDavid Brearley, Gary R. Simpson
Life of this patent
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Abstract
The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.
Claims34
A tuner comprising a mismatch probe and at least one linear actuator, wherein:
- the mismatch probe is configured for movement in a first direction of signal flow along a transmission media and a second direction perpendicular to the signal flow, and whereby at least one of said first and second directions of movement is accomplished by the at least one linear actuators;
- wherein the transmission media is a slab line or waveguide, and said at least one linear actuator comprises a mechanism configured to create force in one linear direction to move said mismatch probe without conversion from rotary motion to linear motion, and a constraint system to keep motion in a straight line.
A tuner comprising:
- a transmission media, wherein the transmission media is a slab line or waveguide;
- a mismatch probe configured for movement in the direction of signal flow along the transmission media and perpendicular to the signal flow;
- and
- wherein the mismatch probe is held by an arm which is spring loaded sideways against a side of the transmission media.
A measurement system comprising:
- an impedance tuner that uses a linear actuator for at least one direction of motion, the impedance tuner comprising a slab line or waveguide transmission media;
- wherein said linear actuator comprises a mechanism configured to create force in one linear direction without conversion from rotary motion to linear motion, and a constraint system to keep motion in a straight line.
A measurement system comprising a tuner comprising:
- a slab line or waveguide transmission media;
- a mismatch probe configured for movement in the direction of signal flow along the transmission media and perpendicular to the signal flow;
- and
- wherein the mismatch probe is held by an arm which is spring loaded sideways against a side of the transmission media.
Dependencies are inferred from the claim text.