Resonant pressure sensor with imporved linearity

A resonant pressure sensor, comprising:

• a housing;
• a housing-fixed portion that is fixed to the housing;
• a substrate that comprises:
• a substrate-fixed portion that is fixed to the housing-fixed portion;
• and
• a substrate-separated portion that is separated from the housing-fixed portion in a first direction and extends from the substrate-fixed portion;
• a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid;
• a first electrode that extends along a second direction perpendicular to the first direction and that outputs an excitation signal to the first resonator to excite the first resonator;
• a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency;
• and
• a processor that measures the static pressure based on the detected change of the resonance frequency, wherein
• the first resonator is disposed between the first electrode and the second electrode in a third direction perpendicular to the first direction and the second direction,
• the pressure-receiving fluid is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate.