Imprint apparatus and article manufacturing method

An article manufacturing method comprising:

• forming a pattern on a substrate using an imprint apparatus that performs an imprint process including a supply step of supplying an imprint material onto a shot region of a substrate, a contact step of bringing the imprint material on the shot region into contact with a mold, a curing step of curing the imprint material in a state in which the imprint material is in contact with the mold, and a mold separation step of separating the mold from the cured imprint material, the apparatus comprising:
• a controller configured to control the imprint process;
• and
• a supply device configured to supply the imprint material in the supply step,
• wherein the supply device includes a plurality of discharge devices configured to discharge the imprint material, and a discharge controller configured to control the plurality of discharge devices under the control of the controller,
• wherein the discharge controller includes a buffer memory configured to temporarily store driving waveform data transferred from the controller,
• wherein each of the plurality of discharge devices includes a discharge element and a driver configured to drive the discharge element based on the driving waveform data stored in the buffer memory,
• wherein, while the supply step of a first shot region is performed, the controller is configured to perform first transfer processing of transferring the driving waveform data for the supply step of a second shot region to a storage area of the buffer memory which is not used in the supply step of the first shot region, and
• wherein, after the supply step of the first shot region is completed and before the contact step, the curing step, and the mold separation step of the first shot region are completed, the controller is configured to perform second transfer processing of transferring the driving waveform data for the supply step of the second shot region to the storage area of the buffer memory which has been used in the supply step of the first shot region;
• and
• processing the substrate on which the pattern has been formed in the forming,
• wherein an article is manufactured from the substrate having undergone the processing.