Workpiece grinding method

A workpiece grinding method for grinding a workpiece with use of a grinding machine including a chuck table that holds the workpiece and a grinding unit that has a spindle and a grinding wheel disposed on the spindle, the grinding wheel having a plurality of grinding stones arranged in an annular pattern, and that grinds the workpiece held on the chuck table with the grinding wheel kept rotating about the spindle, comprising:

• a groove formation step of grinding the workpiece by performing grinding feed of the grinding unit while rotating the spindle without rotation of the chuck table on which the workpiece is held, so that an arcuate groove is formed with a depth not reaching a finish thickness of the workpiece on a side of a back surface of the workpiece;
• a groove removal step of, after the groove formation step, starting rotation of the chuck table with the spindle kept rotating, so that the groove is ground at side walls thereof and is removed from the workpiece;
• and
• a full surface grinding step of, after the groove removal step, performing grinding feed of the grinding unit while rotating the spindle and the chuck table, so that the workpiece is ground in an entirety thereof on the side of the back surface until the workpiece has the finish thickness.