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US 11,590,542 B2Granted
Particle collection device and mask cleaning device having the same
AssigneeSamsung Display Co., Ltd.
InventorsYong-Hwan Ryu, Jiae Kim, Yunji Nam, Sun-Jin Song, In-Ja Han
Life of this patent
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Abstract
A particle collection device includes a collection sheet and a frame on which the collection sheet is mounted. The collection sheet includes a base sheet, a magnetic substance, and a metal protrusion disposed on the base sheet to be adjacent to the magnetic substance.
Claims15
A particle collection device comprising:
- a collection sheet comprising a base sheet, a magnetic substance, and a plurality of metal protrusions disposed on the base sheet to be adjacent to the magnetic substance;
- and
- a frame on which the collection sheet is mounted,
- wherein:
- the magnetic substance is buried in the base sheet to be surrounded by the base sheet;
- the magnetic substance has a stripe shape extending in a longitudinal direction of the base sheet;
- and
- the metal protrusions are arranged in the longitudinal direction along the magnetic substance.
5 more elements
A particle collection device comprising:
- a collection sheet comprising a base sheet, a first magnetic substance buried in the base sheet, and a second magnetic substance disposed on the base sheet to face the first magnetic substance;
- and
- a frame on which the collection sheet is mounted.
A mask cleaning device comprising:
- a cleaning tank comprising a cleaning solution and cleaning a mask assembly disposed therein using the cleaning solution;
- and
- a particle collection device disposed in the cleaning tank to collect particles floating in the cleaning solution, the particle collection device comprising:
- a plurality of collection sheets comprising a base sheet, a magnetic substance, and a plurality of metal protrusions disposed on the base sheet to be adjacent to the magnetic substance;
- and
- a frame on which the collection sheets are mounted,
- wherein:
- the mask assembly comprises:
- a plurality of mask sheets each in which a processing pattern is formed;
- and
- a mask frame on which the mask sheets are mounted;
- the frame has a size corresponding to the mask frame and is spaced apart from the mask frame in the cleaning tank;
- and
- the magnetic substance has a stripe shape extending in a longitudinal direction of the base sheet, and the metal protrusions are arranged in the longitudinal direction along the magnetic substance.
11 more elements
Dependencies are inferred from the claim text.