Ultrasonic sensor, ultrasonic device, and method of manufacturing ultrasonic sensor
AssigneeSeiko Epson Corporation
InventorsChikara Kojima, Hironori Suzuki, Kanechika Kiyose
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Abstract
An ultrasonic sensor includes a vibration plate that includes a vibration portion and is formed of a resin; a wall portion that is provided on the vibration plate, surrounds the vibration portion and is formed of a resin; and a piezoelectric element that is provided in the vibration portion of the vibration plate. Accordingly, the wall portion surrounding the vibration portion can suppress a frequency variation of an ultrasonic wave output from the ultrasonic sensor and can deform the ultrasonic sensor into a shape corresponding to a surface of an object having various shapes.
Claims8
An ultrasonic sensor comprising:
- a vibration plate that includes a vibration portion and is formed of a resin;
- a wall portion that is provided on the vibration plate, surrounds the vibration portion, and is formed of a resin;
- and
- a piezoelectric element that is provided in the vibration portion of the vibration plate.
Dependencies are inferred from the claim text.