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US 11,590,527 B2Granted
Systems, methods, and articles for polymer deposition
AssigneeGVD Corporation
InventorsW. Shannan O'Shaughnessy, Andrew Grant, Kelli J. Byrne, Michael E. Stazinski, Hilton Pryce Lewis
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Abstract
Systems having one or more features that are advantageous for depositing fluorinated polymeric coatings on substrates, and methods of employing such systems to deposit such coatings, are generally provided.
Claims14
A method, comprising:
- applying a voltage and a tensile force to a filament taking the form of a wire made of a material, wherein:
- the wire is positioned in a reaction volume comprising at most 10 mTorr of air and comprising hexafluoropropylene oxide vapor;
- the reaction volume is positioned in a deposition chamber;
- the voltage causes the wire to increase in temperature;
- the wire heats the hexafluoropropylene oxide vapor, thereby causing it to decompose;
- wherein the reaction volume has a total pressure of less than or equal to 100 Torr and greater than or equal to 1 mTorr;
- wherein the temperature of the wire is greater than or equal to 150° C. and less than or equal to 1500° C.;
- and
- wherein a ratio of the applied tensile force to a rated tensile strength of the material forming the wire is greater than or equal to 0.6 and less than or equal to 0.8 at the temperature of the wire.
6 more elements
Dependencies are inferred from the claim text.