Methods of fabricating microfluidic valves and systems

A method of fabricating a microfluidic system, the method comprising:

• forming a microfluidic valve, comprising:
• removing material from a drive body portion to form an input gate terminal and a gate port into the input gate terminal;
• forming a flexible membrane on a gate body portion;
• removing material from the gate body portion to form an output gate terminal and to define a plunger within the output gate terminal, the plunger being bonded to the flexible membrane;
• forming a flexible bubble on a fluid channel body portion;
• removing material from the fluid channel body portion to form an inlet port and an outlet port in fluid communication with an interior of the flexible bubble;
• coupling the drive body portion to the gate body portion and separating the input gate terminal from the output gate terminal with the flexible membrane;
• and
• coupling the gate body portion to the fluid channel body portion;
• operably coupling a drive fluid source to the gate port;
• operably coupling a subject fluid source to the inlet port;
• and
• operably coupling a fluid-driven mechanism to the outlet port to be operated by subject fluid when the microfluidic valve is in an open state.