Variable capacitance circuit, circuit device, and oscillator

A variable capacitance circuit whose capacitance value is variably controlled based on control data, the variable capacitance circuit comprising:

• a capacitor array including a plurality of capacitors;
• and
• a switch array having a plurality of switches that are turned on or off based on the control data and provided in series with the capacitor array between a first node and a ground node, wherein
• the capacitor array includes a first capacitor in which a plurality of metal-insulator-metal (MIM) capacitors are coupled in parallel, and a second capacitor in which a plurality of MIM capacitors are coupled in series,
• the switch array includes a first switch coupled in series with the first capacitor between the first node and the ground node and a second switch coupled in series with the second capacitor between the first node and the ground node, and
• when a capacitance value between the first node and the ground node due to the first capacitor and a parasitic capacitance of the first capacitor is defined as a first capacitance value, and a capacitance value between the first node and the ground node due to the second capacitor and a parasitic capacitance of the second capacitor is defined as a second capacitance value,
• in plan view, a shape pattern of at least one of a first electrode that is an electrode of the first capacitor, a first ground shield surrounding the first capacitor, a second electrode that is an electrode of the second capacitor, and a second ground shield surrounding the second capacitor is set
• so that a first capacitance difference per 1 LSB of the control data between the first capacitance value when the first switch is turned on and the first capacitance value when the first switch is turned off and a second capacitance difference per 1 LSB of the control data between the second capacitance value when the second switch is turned on and the second capacitance value when the second switch is turned off are close to each other.