Molding apparatus, molding method, and manufacturing method of article

An apparatus that forms a composition on a substrate using a superstrate, comprising:

• a gas supply unit configured to supply gas to a periphery of a space sandwiched between the superstrate and the substrate;
• a deforming mechanism configured to deform the superstrate, wherein the deforming mechanism includes a pressure control unit for deforming the superstrate by controlling pressure in a space opposite to the substrate;
• and
• a controller configured to perform control in a following order:
• (1) causing the gas supply unit to supply the gas such that a density of the gas in the periphery of the space sandwiched between the superstrate and the substrate is increased;
• (2) reducing pressure in the space by the pressure control unit to deform mold the superstrate such that a central part of the superstrate is separated from the substrate more than a peripheral part of the superstrate in a state that the superstrate is not in contact with the composition on the substrate;
• (3) increasing pressure in the space by the pressure control unit to deform the superstrate such that a central part of the superstrate is closer to the substrate than a peripheral part of the superstrate in a state that the superstrate is not in contact with the composition on the substrate;
• and
• (4) bringing the superstrate in contact with the composition on the substrate in a state that the superstrate is deformed so that the central part of the superstrate is closer to the substrate than the central part of the superstrate.