Substrate carrier deterioration detection and repair
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJen-Ti Wang, Chih-Wei Lin, Fu-Hsien Li, Yi-Ming Chen, Cheng-Ho Hung
Life of this patent
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Abstract
An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.
Claims20
An apparatus for semiconductor manufacturing, comprising:
- an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing;
- a first robotic arm configured to uninstall the housing from the carrier and to reinstall the housing into the carrier;
- one or more second robotic arms configured to remove the filter from the carrier and to install a new filter into the carrier;
- and
- an output port to release the carrier to production.
An apparatus for semiconductor manufacturing, comprising:
- an input port to receive a substrate carrier, wherein the substrate carrier includes a carrier body, a housing, and an air filter installed between the carrier body and the housing;
- a first robotic arm configured to uninstall the housing from the substrate carrier;
- one or more second robotic arms configured to remove the air filter from the substrate carrier;
- a controller configured to determine quality of a new air filter before the new air filter is installed into the substrate carrier;
- and
- an output port to release the substrate carrier to production after the new air filter is installed.
An apparatus for semiconductor manufacturing, comprising:
- an input port to receive a substrate carrier, wherein the substrate carrier includes a carrier body, a housing, and a filter installed between the carrier body and the housing;
- a first mechanism configured to uninstall the housing from the substrate carrier;
- a second mechanism configured to remove the filter from the substrate carrier;
- a controller configured to determine quality of a new filter;
- a third mechanism configured to inspect the new filter after the new filter is installed into the substrate carrier;
- and
- an output port to release the substrate carrier to production after the new filter is installed into the substrate carrier and is inspected.
Dependencies are inferred from the claim text.