Resonant accelerometer

A system comprising:

• a proof mass;
• a first anchor located in an opening, the opening defined by a body of the proof mass;
• a spring between the proof mass and the first anchor, wherein the spring and the proof mass form a spring system suspended from the first anchor;
• a first drive electrode;
• a first sense beam with a first end attached to the proof mass, the first sense beam configured to oscillate at a particular resonance frequency based on application of a signal to the first drive electrode;
• a support structure located in the opening, wherein:
• the support structure is coupled to the first anchor and includes a support beam,
• the spring corresponds to an end of the support beam that has a reduced thickness,
• the first sense beam includes a second end attached to the support beam such that the first sense beam is orthogonal to the support beam, and
• the support structure operates as a stress decoupling area that prevents or limits propagation of stress from the first anchor to the first sense beam and the spring system;
• and
• one or more processors configured to:
• generate the signal applied to the first drive electrode;
• and
• calculate an acceleration value based on a signal indicating a change in the resonance frequency of the first sense beam.