Measuring system and manufacturing process of such a measuring system

A system adapted to measure multiple biophysical characteristics of cells, the system comprising:

• a microfluidic chip provided with a microfluidic channel which allows cells to flow through, the microfluidic channel having an inlet, an outlet, and a lateral opening situated between the inlet and the outlet;
• and
• a capacitive sensor integrated in the microfluidic chip, adapted to obtain biophysical characteristics of a single cell in the microfluidic channel by directly manipulating the single cell by sensor elements positioned through the lateral opening of the microfluidic channel,
• wherein the sensor elements include a pair of arms extending toward each other, tips of the pair of arms being arranged in lateral openings formed on opposite sides of the microfluidic channel,
• the capacitive sensor comprising an electrostatic actuator, a stationary part and a movable part driven by the electrostatic actuator to move relative to the stationary part, the stationary part being fixed to the microfluidic chip, the movable part being arranged in the lateral opening of the microfluidic channel, wherein the movable part comprises at least one arm of the pair of arms which is configured to move closer to or away from the other arm,
• wherein the electrostatic actuator is arranged in an air volume opening into the microfluidic channel through the lateral opening, and
• wherein the lateral openings and the tips of the arms are sized to create an interface between fluid and air in the system, so as to allow the tips of the arms to be introduced into the microfluidic channel through the respective opening while preventing a fluid within the microfluidic channel from leaking into the air volume.