An implementation device of motor tracking error reduction method based on micro-drive unit, comprising a base, a micro-drive unit, a motor assembly, a micro-drive controller connected to the micro-drive unit, a motor controller connected to the motor assembly and a sensor installed on the base, the micro-drive unit and the motor assembly are both arranged on the base;
- the motor assembly comprises a motor mover, wherein the sensor is configured to feed back a position information of the motor mover to the micro-drive controller;
- the micro-drive controller controls the micro-drive unit to carry out a displacement compensation of the motor mover, and feeds back the compensated tracking error of the motor mover to the motor controller.