Excimer lamp
AssigneeUshio Denki Kabushiki Kaisha
InventorsShigeki Fujisawa, Kazuyuki Mori
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Abstract
In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.
Claims5
An excimer lamp comprising:
- a discharge vessel including a pair of plane face parts and a pair of side face parts and having a flat, substantially quadrilateral cross section;
- a pair of external electrodes each disposed on each of outer surfaces of the plane face parts of the discharge vessel;
- an auxiliary electrode extending from an end portion of the external electrode to a specific area where a thickness of the discharge vessel is smaller than a distance between the plane face parts;
- and
- a light transmitting part equipped on at least one of the pair of external electrodes to pass through ultraviolet generated in the discharge vessel, wherein
- the auxiliary electrode is narrower than the external electrode.
Dependencies are inferred from the claim text.