Structures in optical devices having graphene and manufacturing method for the same
AssigneesKorea Institute of Science and Technology, Korea Institute of Machinery & Materials
InventorsYong Won Song, Md. Siam Uddin, Jiyeon Choi, Sungil Kim, Dohyun Kim
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Abstract
The present disclosure discloses an optical device structure including an optical fiber including a core part, a clad part, and a three-dimensional micro hole structure in the clad part, wherein a surface of the three-dimensional micro hole structure is provided with at least a non-flat surface, and a conformal graphene layer is formed on the surface of the three-dimensional micro hole structure, and a method of manufacturing the same.
Claims13
An optical device structure, comprising:
- an optical fiber including a core part, a clad part, and a three-dimensional micro hole structure in the clad part,
- wherein a surface of the three-dimensional micro hole structure is provided with at least a non-flat surface,
- a conformal graphene layer is formed on the surface of the three-dimensional micro hole structure, and
- the conformal graphene layer is formed through nucleation and growth on a target base material surface by diffusion of carbon atoms generated through decomposition of a carbon precursor by a catalytic action on a non-metal layer.
A method of manufacturing an optical device structure, comprising
- disposing an optical fiber including a core part, a clad part, and a three-dimensional micro hole structure in the clad part;
- forming a graphene layer on a surface of the three-dimensional micro hole structure, which is an operation of forming a non-metal layer on a dummy substrate;
- disposing the optical fiber so that the non-metal layer on the dummy substrate faces the three-dimensional micro hole structure;
- and
- synthesizing a graphene film by injecting a carbon precursor to form graphene on the surface of the three-dimensional micro hole structure,
- wherein nucleation and growth of the graphene is performed on a surface of an application target of the graphene through decomposition of the carbon precursor,
- the carbon precursor is supplied with energy of a metastable site of the non-metal layer for decomposition, and is decomposed into carbon atoms on a surface of the non-metal layer to form the graphene,
- the surface of the three-dimensional micro hole structure is provided with at least a non-flat surface, and
- a conformal graphene layer is formed on the surface of the three-dimensional micro hole structure.
Dependencies are inferred from the claim text.