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US 11,557,462 B2Granted
Collecting and recycling rare gases in semiconductor processing equipment
AssigneeKLA Corporation
InventorsChao Chang, Michael Friedmann
Life of this patent
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Abstract
A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.
Claims20
A system comprising:
- a process chamber that uses xenon and/or krypton;
- and
- a recovery unit in fluid communication with the process chamber, wherein the recovery unit includes:
- a mixture tank in fluid communication with the process chamber via a gas exhaust line;
- a first column in fluid communication with the mixture tank;
- a second column in fluid communication with the mixture tank;
- a first storage tank in fluid communication with the first column and the process chamber;
- a second storage tank in fluid communication with the second column and the process chamber;
- a first gas supply line connecting the first storage tank to the process chamber;
- a second gas supply line connecting the second storage tank to the process chamber;
- a first loopback line connecting the first gas supply line to the gas exhaust line;
- and
- a second loopback line connecting the second gas supply line to the exhaust line.
10 more elements
A method comprising:
- processing a semiconductor wafer in a process chamber with a process gas, wherein the process gas includes a rare gas and buffer gas;
- pumping the process gas from the process chamber to a mixture tank via a gas exhaust line;
- pumping the process gas from the mixture tank to a first column and a second column;
- separating the process gas in the first column and the second column;
- transporting the buffer gas from the first column to a first storage tank;
- transporting the rare gas from the second column to a second storage tank;
- transporting the buffer gas from the first storage tank and the rare gas from the second storage tank to the process chamber;
- diverting at least some of the rare gas from the second gas supply line to the gas exhaust line instead of the process chamber;
- and
- diverting at least some of the buffer gas from the first gas supply line to the gas exhaust line instead of the process chamber.
7 more elements
Dependencies are inferred from the claim text.