RF chirp reduction in MZ modulator
AssigneeLumentum Technology UK Limited
InventorsNeil David Whitbread, Stephen Jones
Life of this patent
Estimating the term…
Abstract
A waveguide structure for use in a balanced push-pull Mach Zehnder modulator. The waveguide structure comprises a plurality of layers. The layers comprise, in order: an insulating or semi-insulating substrate; an lower cladding layer; an waveguide core layer; and an upper cladding layer. The lower cladding layer, waveguide core layer, and upper cladding layer are etched to form: a signal waveguide and a ground waveguide, which are connected via the lower cladding layer; and a signal line and a ground line, each located adjacent to the respective waveguide, and each connected to the respective waveguide via one or more respective resistive structures connected in the plane of the lower cladding layer.
Claims20
A waveguide structure comprising:
- a plurality of layers, the layers comprising, in order:
- an insulating or semi-insulating substrate;
- a lower cladding layer;
- a waveguide core layer;
- and
- an upper cladding layer;
- wherein the lower cladding layer, the waveguide core layer, and the upper cladding layer are etched to form:
- a signal waveguide and a ground waveguide that are connected via the lower cladding layer;
- and
- a signal line and a ground line that are:
- located adjacent to a respective waveguide, and
- connected to a respective waveguide via one or more respective resistive structures connected in a plane of the lower cladding layer.
A balanced push-pull Mach-Zehnder interferometer comprising:
- a waveguide structure comprising:
- a plurality of layers, the layers comprising, in order:
- an insulating or semi-insulating substrate;
- a lower cladding layer;
- a waveguide core layer;
- and
- an upper cladding layer;
- wherein the lower cladding layer, the waveguide core layer, and the upper cladding layer are etched to form:
- a signal waveguide and a ground waveguide that are connected via the lower cladding layer;
- and
- a signal line and a ground line that are:
- located adjacent to a respective waveguide, and
- connected to a respective waveguide via one or more respective resistive structures connected in a plane of the lower cladding layer.
A method of manufacturing a waveguide structure, the method comprising:
- providing a layered structure comprising:
- an insulating or semi-insulating substrate;
- a lower cladding layer;
- a waveguide core layer;
- and
- a upper cladding layer;
- and
- etching the lower cladding layer, the waveguide core layer, and the upper cladding layer to form:
- a signal waveguide and a ground waveguide that are connected via the lower cladding layer;
- and
- a signal line and a ground line that are:
- located adjacent to a respective waveguide, and
- connected to a respective waveguide via one or more respective resistive structures in a plane of the lower cladding layer.
Dependencies are inferred from the claim text.