Pad removal method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChunHung Chen, Sheng-Chen Wang
Life of this patent
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Abstract
A pad removal method includes affixing a first end of a pad guide to a first edge location of a pad. The pad removal method further includes affixing a second end of the pad guide to a second edge location of the pad. The pad removal method further includes moving the first end from a first position, a first distance from the second edge location, to a second position, a second distance from the second edge location, wherein the first distance is greater than a diameter of the pad, and the second distance is less than the diameter of the pad.
Claims20
A pad removal method comprising:
- affixing a first end of a pad guide to a first edge location of a pad;
- affixing a second end of the pad guide to a second edge location of the pad;
- and
- moving the first end from a first position, a first distance from the second edge location, to a second position, a second distance from the second edge location, wherein the first distance is greater than a width of the pad, and the second distance is less than the width of the pad.
A pad removal method comprising:
- affixing a first end of a pad guide to a first edge location of a pad;
- affixing a second end of the pad guide to a second edge location of the pad;
- and
- moving the first end in a first direction from a first position to a second position using a first actuator, wherein moving the first end from the first position to the second position comprises bending the pad guide in a second direction perpendicular to the first direction.
A pad removal method comprising:
- affixing a pad guide to a plurality of edge locations of a pad, wherein a number of the plurality of edge locations is at least four;
- and
- moving a first end of the pad guide in a first direction from a first position to a second position using a first actuator, wherein moving the first end from the first position to the second position comprises bending the pad guide in a second direction perpendicular to the first direction.
Dependencies are inferred from the claim text.