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US 11,554,493 B2Granted
Transfer apparatus
AssigneeTokyo Electron Limited
InventorsShota Shimazaki, Keisuke Kondoh
Life of this patent
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Abstract
According to one embodiment of the present disclosure, there is provided a transfer apparatus comprising at least one arm configured to support a substrate; at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm; and a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.
Claims9
A transfer apparatus comprising:
- at least one arm configured to support a substrate;
- at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm;
- and
- a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear,
- wherein the at least one arm comprises two arms, and end portions of the two arms are supported and overlap each other at the joint,
- wherein the at least one gear comprises two gears coaxially disposed to correspond to the two arms, each of the two gears configured to rotate a corresponding arm of the two arms, and a transmission portion being formed at a first gear of the two gears, and
- wherein the detector is disposed to be closer to the first gear than a second gear of the two gears to face the first gear, is configured to detect a temperature of the first gear from a portion where the transmission portion is not formed at the first gear, and is configured to detect a temperature of the second gear through the transmission portion of the first gear.
4 more elements
Dependencies are inferred from the claim text.